The new series can be utilized to express aberration distribution of a high na and wide field optical system like a microlithographic projection lens. Please note this list is tentative and may change at any time. Milster graduated with a bs in electrical engineering at the university of missourirolla in 1981 and phd in optical sciences from the university of arizona in 1987. Synopsys code v enhances analysis of precision optical systems. Modern lens design using a lens manufacturing database. Code v is the industryleading optical design software code v is used for the design, optimization, analysis, and tolerancing of imageforming optical systems and freespace photonic devices. This step includes determining the possible variable parameters in the system model that can be modified to improve performance, generating the appropriate merit function and applicationspecific optical design figure 1. The heart of any optical design software is its optimizer. International optical design conference camera in a can lens design contest was optimized using global synthesis. Fundamental considerations for zoom lens design request pdf.
Modeling interferometers with lens design software. The needs of microlithographic lenses are driving advances in lens design software, spherical and aspherical lens manufacturing, glass production and lens metrology. Oslo optics software for layout and optimization is a powerful optical design program with the scope needed to meet todays optical design requirements. The capabilities that welldesigned aspheric lens surfaces can bring to optical systems are dramatic, from the simplification of objective lenses for cd and dvd drives to larger field sizes for microlithographic projection lenses. Buy intermediate optical design spie press monograph vol. Osa automatic clocking optimization for compensating two.
We also assemble a custom 5x microscopy objective that has diffractionlimited performances from. It was a quick, cheap process and had been used to print british army maps during the peninsula war. He deals with lens design software, primarily oslo, by far the current market leaders, and provides 7 comprehensive worked examples, all new to this edition. Proceedings volume 5874 current developments in lens design and optical engineering vi. Imaging aberrations, defocus, and zernike polynomials definition of a perfect optical system. In xfdtd, a set of eight 1 to 8 wilkinson stripline power divider networks is designed to act as the connection between the rotman lens and the antenna array. Optical fiber laser products,motion control components. Clocking of lens elements is frequently used as an effective method of compensating for twodimensional tolerances such as material inhomogeneity and surface figure errors.
The device includes an elongation structure, where said elongation structure includes a tapered channel that decreases in width from a first end to a second end. Intermediate optical design 2004 kidger publications. Professional lens designers use optics packages such as zemax and code v, but these programs can cost thousands of. Rotman lens design software rld synthesis, analysis. Optical design software helps lens designers predict the behavior of a lens and the constraints the lens will place on a camera.
Oslo is a powerful optical design program with the scope. Current developments in lens design and optical engineering. New shape specification eases design and fabrication of aspheres. Just 20 years ago, design software seldom was used for illumination applications.
Snps, a world leader in software and ip used in the design, verification and manufacture of electronic components and systems, today announced the availability of enhancements to its code v optical design and. Osa the optical design for microlithographic lenses. Smith reveals timetested methods for designing topquality lenses. Sep 28, 2011 fully integrated glass expert tool automatically finds the optimal set of glasses for a users lens design. Even current lenses, comprising more than 20 elements, can be understandable through the analysis. In addition to classical lens design features, it combines advanced ray tracing, analysis, and optimization methods with a highspeed macro language to solve a wide variety of new problems in optical design. Code v combines superior engineering capabilities with the control and access of an intuitive user interface.
The main imaging lens of a stepper is the most demanding application of commercial lens design and fabrication today. The new functions can be utilized to express aberrations of a high na and wide field optical system like a microlithographic projection lens. Users have found that code vs optimization is unmatched in the variety of systems it can. The performance evaluation of these designs are also shown.
Synopsys code v enhances analysis of precision optical. This first generation microlithographic lens had a track length, or conjugate distance, of about 600mm. Typically, the lens designer has to determine the optimum angles of rotation by manually modeling lens element clocking in the commercial optical design software because the nature of errors resolved by lens clocking does. In 2012, youngworth and betensky 5 proposed a firstorder zoom lens design. Typically, the lens designer has to determine the optimum angles of rotation by manually modeling lens element clocking in the commercial optical design software because the nature of errors. The new functions are orthogonal to each other and expressed by a simple combination of zernike functions of pupil coordinates and zernike functions of field coordinates. Microlithographic reduction projection catadioptric objective. This video introduces optical design and optical aberrations. Choosing the right optical design software is about more than just the software. Delving deep into the mechanics of lens design, optics legend warren j.
Selfcompensation for trefoil aberration of symmetric. Synopsys optical engineers use global synthesis on every applicable design project. This paper describes several kinds of new technologies introduced into the latest microlithographic lens system for nikons duv deep ultra violet scanner. Code v software has contributed significantly to important technological advances across a wide spectrum of fields such as.
Snps, a world leader in software and ip used in the design, verification and manufacture of electronic components and systems, today announced the availability of enhancements to its code v optical design and analysis software, acquired as part of synopsys acquisition of optical research associates ora. Design examples of projection lenses for iline exposure lithography and for excimer laser exposure system are presented. Nov 22, 2001 a microlithographic reduction projection catadioptric objective comprising in sequence, from an object side to an image side, a field lens group, a catadioptric group comprising one or more negative lenses and a concave mirror generating axial chromatic aberration, a group comprising an odd number of mirrors, and a positive lens group. The software s algorithms now are a key and dominant technology in the design of the microlithographic lenses used by many chip makers in their attempts to keep pace with everdecreasing transistor sizes. Jul 18, 2006 the evolution of the microlithographic lens is described based on an analysis of main features of the lenses in each generation. Fastforward to today, we have complex lens systems that are hard to manufacture and test, in combination with the extremely fast computational powers that we have now, the calculations on software dominate the lens design process. Moreover, the new aberration functions can be used for the microlithographic lens manufacturing process because they can express each aberration component of. Orthogonal aberration functions for microlithographic optics.
Design specialty lenses like high diopter lenses or lenses with high cylinders. The resolution of modern microlithographic systems for. Intermediate optical design spie press monograph vol. High resolution microlithographic reduction lenses are described. Creating camera lenses with stereolithography formlabs. You are here winlens optical design software free winlens basic. Oct 14, 1986 thus, the microlithographic system typically operates in an air atmosphere which is subject to barometric changes and which fills the space between lens 21 and the reticle holder 11 as well as the space between the lens and the wafer stage. The design of lens 21 is shown in greater detail in fig. Lens design software programs calculate the system mtf either through the autocorrelation of the exit pupil wavefront function or by fourier transforming the point spread function, which is calculated by fourier transforming the.
Some tesla talk, lets encrypt, ha proxy connections and year end business lawrence systems pc pickup 216 watching live now. The design of the rotman lens is performed using remcoms rotman lens designer rld software, which produces a cad version of the device for use in xfdtd. Optical design of the dioptric microlithographic lens was started by modifying a design of projection lens for micro films, which was named ultra micro nikkor. Snps news, a world leader in software and ip used in the design, verification and manufacture of electronic components and systems, today announced the availability of enhancements to its code v optical design and analysis software, acquired as part of synopsys acquisition of optical research associates ora. Making a functional lens starts with proper lens design.
Lithography, or printing from soft stone, largely took the place of engraving in the production of english commercial maps after about 1852. Virtually all lens design software today allows graphical depiction and subsequent tolerancing of polychromatic mtf. We need to be more analytical and use our brains in lens design. Aberration functions for microlithographic optics springerlink. Sophisticated software allows complex optical design. The synopsys optical solutions group osg, formerly optical research associates ora, has been providing worldclass support to our code v customers for over 40years. Free version of the winlens3d optical design package, which provides serious design and analysis tools for optical engineer, student or designer. The needs of microlithographic lenses are driving advances in lens design software, spherical and aspherical lens manufacturing, glass production, and lens metrology.
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